Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events

M. Vimala Rani, M. Mathirajan. Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events. In 2015 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2015, Singapore, December 6-9, 2015. pages 104-108, IEEE, 2015. [doi]

@inproceedings{RaniM15,
  title = {Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events},
  author = {M. Vimala Rani and M. Mathirajan},
  year = {2015},
  doi = {10.1109/IEEM.2015.7385617},
  url = {http://dx.doi.org/10.1109/IEEM.2015.7385617},
  researchr = {https://researchr.org/publication/RaniM15},
  cites = {0},
  citedby = {0},
  pages = {104-108},
  booktitle = {2015 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2015, Singapore, December 6-9, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-8066-9},
}