Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events - researchr publication related

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M. Vimala Rani, M. Mathirajan. Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events. In 2015 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2015, Singapore, December 6-9, 2015. pages 104-108, IEEE, 2015. [doi]

The following publications are possibly variants of this publication:

A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturingM. Vimala Rani, Muthu Mathirajan. ijpr, 61(16):5744-5771, August 2023. [doi]

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