Cristian Ravariu, Florin Babarada. Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. iJOE, 7(2):36-39, 2011. [doi]
@article{RavariuB11,
title = {Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure},
author = {Cristian Ravariu and Florin Babarada},
year = {2011},
url = {http://www.online-journals.org/index.php/i-joe/article/view/1543},
tags = {case study},
researchr = {https://researchr.org/publication/RavariuB11},
cites = {0},
citedby = {0},
journal = {iJOE},
volume = {7},
number = {2},
pages = {36-39},
}