Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Cristian Ravariu, Florin Babarada. Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. iJOE, 7(2):36-39, 2011. [doi]

Abstract

Abstract is missing.