Improving Ge-rich GST ePCM reliability through BEOL engineering

Andrea Redaelli, Anna Gandolfo, G. Samanni, E. Gomiero, E. Petroni, Luca Scotti, A. Lippiello, Paolo Mattavelli, J. Jasse, D. Codegoni, A. Serafini, Rossella Ranica, C. Boccaccio, J. Sandrini, R. Berthelon, J. C. Grenier, Olivier Weber, David Turgis, A. Valery, S. Del Medico, V. Caubet, J. P. Reynard, Didier Dutartre, L. Favennec, A. Conte, Fabio Disegni, M. De Tomasi, A. Ventre, M. Baldo, Daniele Ielmini, Alfonso Maurelli, P. Ferreira, Franck Arnaud, F. Piazza, Paolo Cappelletti, R. Annunziata, R. Gonella. Improving Ge-rich GST ePCM reliability through BEOL engineering. In 51st IEEE European Solid-State Device Research Conference, ESSDERC 2021, Grenoble, France, September 13-22, 2021. pages 231-234, IEEE, 2021. [doi]

Abstract

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