Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy

Ahmed Amine Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet. Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy. In 13th Latin American Test Workshop, LATW 2012, Quito, Ecuador, April 10-13, 2012. pages 1-6, IEEE Computer Society, 2012. [doi]

Abstract

Abstract is missing.