Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers

Ahmed Amine Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet. Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers. J. Electronic Testing, 30(1):87-100, 2014. [doi]

Abstract

Abstract is missing.