A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

Sen Ren, Weizheng Yuan, Dayong Qiao, Jinjun Deng, Xiaodong Sun. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. Sensors, 13(12):17006-17024, 2013. [doi]

Authors

Sen Ren

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Weizheng Yuan

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Dayong Qiao

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Jinjun Deng

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Xiaodong Sun

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