Sen Ren, Weizheng Yuan, Dayong Qiao, Jinjun Deng, Xiaodong Sun. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. Sensors, 13(12):17006-17024, 2013. [doi]
@article{RenYQDS13,
title = {A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure},
author = {Sen Ren and Weizheng Yuan and Dayong Qiao and Jinjun Deng and Xiaodong Sun},
year = {2013},
doi = {10.3390/s131217006},
url = {http://dx.doi.org/10.3390/s131217006},
researchr = {https://researchr.org/publication/RenYQDS13},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {13},
number = {12},
pages = {17006-17024},
}