Romain Ritzenthaler, Hans Mertens, A. De Keersgieter, Jérôme Mitard, D. Mocuta, N. Horiguchi. Isolation of nanowires made on bulk wafers by ground plane doping. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 300-303, IEEE, 2017. [doi]
Abstract is missing.