Dispatching of lots to dynamically reduce the wafers at risk in semiconductor manufacturing

Gloria Rodríguez-Verján, Eric Tartiere, Jacques Pinaton, Stéphane Dauzère-Pérès, Alexis Thieullen. Dispatching of lots to dynamically reduce the wafers at risk in semiconductor manufacturing. In 2012 IEEE International Conference on Automation Science and Engineering, CASE 2012, Seoul, Korea (South), August 20-24, 2012. pages 920-923, IEEE, 2012. [doi]

Abstract

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