Supersteep retrograde doping in ferroelectric MOSFETs for sub-60mV/dec subthreshold swing

Tommaso Rollo, David Esseni. Supersteep retrograde doping in ferroelectric MOSFETs for sub-60mV/dec subthreshold swing. In 46th European Solid-State Device Research Conference, ESSDERC 2016, Lausanne, Switzerland, September 12-15, 2016. pages 360-363, IEEE, 2016. [doi]

Abstract

Abstract is missing.