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Blocking Oxide Material Engineering to Improve Retention Loss in 3D NAND: a Modeling Process Optimization Study

Tommaso Rollo, Hansel Lo, Luca Larcher, Christopher Olsen, Milan Pesic. Blocking Oxide Material Engineering to Improve Retention Loss in 3D NAND: a Modeling Process Optimization Study. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 1-5, IEEE, 2024. [doi]

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Tommaso Rollo

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Hansel Lo

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Luca Larcher

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Christopher Olsen

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Milan Pesic

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