A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

B. F. Romanowicz, M. H. Zaman, S. F. Bart, V. L. Rabinovich, I. Tchertkov, C. Hsu, John R. Gilbert. A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS. In L. Miguel Silveira, Srinivas Devadas, Ricardo Augusto da Luz Reis, editors, VLSI: Systems on a Chip, IFIP TC10/WG10.5 Tenth International Conference on Very Large Scale Integration (VLSI 99), December 1-4, 1999, Lisbon, Portugal. Volume 162 of IFIP Conference Proceedings, pages 636-648, Kluwer, 1999.

Abstract

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