Experimental investigation on the impact of stress free temperature on the electromigration performance of copper dual damascene submicron interconnect

Arijit Roy, Cher Ming Tan. Experimental investigation on the impact of stress free temperature on the electromigration performance of copper dual damascene submicron interconnect. Microelectronics Reliability, 46(9-11):1652-1656, 2006. [doi]

Abstract

Abstract is missing.