An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices

Jinyu Ruan, Nicolas Monnereau, David Trémouilles, Nicolas Mauran, Fabio Coccetti, Nicolas Nolhier, Robert Plana. An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices. IEEE T. Instrumentation and Measurement, 61(2):456-461, 2012. [doi]

Authors

Jinyu Ruan

This author has not been identified. Look up 'Jinyu Ruan' in Google

Nicolas Monnereau

This author has not been identified. Look up 'Nicolas Monnereau' in Google

David Trémouilles

This author has not been identified. Look up 'David Trémouilles' in Google

Nicolas Mauran

This author has not been identified. Look up 'Nicolas Mauran' in Google

Fabio Coccetti

This author has not been identified. Look up 'Fabio Coccetti' in Google

Nicolas Nolhier

This author has not been identified. Look up 'Nicolas Nolhier' in Google

Robert Plana

This author has not been identified. Look up 'Robert Plana' in Google