An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices

Jinyu Ruan, Nicolas Monnereau, David Trémouilles, Nicolas Mauran, Fabio Coccetti, Nicolas Nolhier, Robert Plana. An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices. IEEE T. Instrumentation and Measurement, 61(2):456-461, 2012. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.