An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices

Jinyu Ruan, Nicolas Monnereau, David Trémouilles, Nicolas Mauran, Fabio Coccetti, Nicolas Nolhier, Robert Plana. An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices. IEEE T. Instrumentation and Measurement, 61(2):456-461, 2012. [doi]

@article{RuanMTMCNP12,
  title = {An Accelerated Stress Test Method for Electrostatically Driven MEMS Devices},
  author = {Jinyu Ruan and Nicolas Monnereau and David Trémouilles and Nicolas Mauran and Fabio Coccetti and Nicolas Nolhier and Robert Plana},
  year = {2012},
  doi = {10.1109/TIM.2011.2161937},
  url = {http://dx.doi.org/10.1109/TIM.2011.2161937},
  researchr = {https://researchr.org/publication/RuanMTMCNP12},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {61},
  number = {2},
  pages = {456-461},
}