External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Modeling and Identification of Inter-Stage Couplings and Disturbances in a High-Precision Nanopositioning and Nanomeasuring Machine

Josias Rühle, Oliver Sawodny. Modeling and Identification of Inter-Stage Couplings and Disturbances in a High-Precision Nanopositioning and Nanomeasuring Machine. In 18th IEEE International Conference on Advanced Motion Control, AMC 2024, Kyoto, Japan, February 28 - March 1, 2024. pages 1-6, IEEE, 2024. [doi]

Abstract

Abstract is missing.

runs on