A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors

Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, Jose Luis Sanchez-Rojas. A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors. Sensors, 19(3):658, 2019. [doi]

Authors

Víctor Ruiz-Díez

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Javier Toledo

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Jorge Hernando-García

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Abdallah Ababneh

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Helmut Seidel

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Jose Luis Sanchez-Rojas

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