A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors

Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, Jose Luis Sanchez-Rojas. A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors. Sensors, 19(3):658, 2019. [doi]

Abstract

Abstract is missing.