A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors

Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, Jose Luis Sanchez-Rojas. A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors. Sensors, 19(3):658, 2019. [doi]

@article{Ruiz-DiezTHASS19,
  title = {A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors},
  author = {Víctor Ruiz-Díez and Javier Toledo and Jorge Hernando-García and Abdallah Ababneh and Helmut Seidel and Jose Luis Sanchez-Rojas},
  year = {2019},
  doi = {10.3390/s19030658},
  url = {https://doi.org/10.3390/s19030658},
  researchr = {https://researchr.org/publication/Ruiz-DiezTHASS19},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {19},
  number = {3},
  pages = {658},
}