Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy

Michael G. Ruppert, Yuen Kuan Yong. Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy. In 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2018, Auckland, New Zealand, July 9-12, 2018. pages 144-149, IEEE, 2018. [doi]

Abstract

Abstract is missing.