High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor

Deepak R. Sahoo, Walter Häberle, Peter Bächtold, Abu Sebastian, Haralampos Pozidis, Evangelos Eleftheriou. High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor. In American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009. pages 2278-2283, IEEE, 2009. [doi]

Abstract

Abstract is missing.