A MEMS resonant magnetometer based on capacitive detection

Mohamed Hadj Said, Fares Tounsi, Mohamed Masmoudi, Petros Gkotsis, Laurent A. Francis. A MEMS resonant magnetometer based on capacitive detection. In 10th International Multi-Conferences on Systems, Signals & Devices, SSD 2013, Hammamet, Tunisia, March 18-21, 2013. pages 1-5, IEEE, 2013. [doi]

Authors

Mohamed Hadj Said

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Fares Tounsi

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Mohamed Masmoudi

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Petros Gkotsis

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Laurent A. Francis

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