A MEMS resonant magnetometer based on capacitive detection

Mohamed Hadj Said, Fares Tounsi, Mohamed Masmoudi, Petros Gkotsis, Laurent A. Francis. A MEMS resonant magnetometer based on capacitive detection. In 10th International Multi-Conferences on Systems, Signals & Devices, SSD 2013, Hammamet, Tunisia, March 18-21, 2013. pages 1-5, IEEE, 2013. [doi]

@inproceedings{SaidTMGF13,
  title = {A MEMS resonant magnetometer based on capacitive detection},
  author = {Mohamed Hadj Said and Fares Tounsi and Mohamed Masmoudi and Petros Gkotsis and Laurent A. Francis},
  year = {2013},
  doi = {10.1109/SSD.2013.6564153},
  url = {https://doi.org/10.1109/SSD.2013.6564153},
  researchr = {https://researchr.org/publication/SaidTMGF13},
  cites = {0},
  citedby = {0},
  pages = {1-5},
  booktitle = {10th International Multi-Conferences on Systems, Signals & Devices, SSD 2013, Hammamet, Tunisia, March 18-21, 2013},
  publisher = {IEEE},
  isbn = {978-1-4673-6459-1},
}