Noncontact nanometric positioning of probe tip for continuous stiffness measurement system - researchr publication authors

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S. Sakuma, F. Arai. Noncontact nanometric positioning of probe tip for continuous stiffness measurement system. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 60-62, IEEE, 2011. [doi]

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