Noncontact nanometric positioning of probe tip for continuous stiffness measurement system

S. Sakuma, F. Arai. Noncontact nanometric positioning of probe tip for continuous stiffness measurement system. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 60-62, IEEE, 2011. [doi]

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