S. Sakuma, F. Arai. Noncontact nanometric positioning of probe tip for continuous stiffness measurement system. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 60-62, IEEE, 2011. [doi]
@inproceedings{SakumaA11,
title = {Noncontact nanometric positioning of probe tip for continuous stiffness measurement system},
author = {S. Sakuma and F. Arai},
year = {2011},
doi = {10.1109/MHS.2011.6102159},
url = {http://dx.doi.org/10.1109/MHS.2011.6102159},
researchr = {https://researchr.org/publication/SakumaA11},
cites = {0},
citedby = {0},
pages = {60-62},
booktitle = {International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011},
publisher = {IEEE},
isbn = {978-1-4577-1360-6},
}