In-situ X-ray μLaue diffraction study of copper through-silicon vias

Dario Ferreira Sanchez, Shay Reboh, Monica Larissa Djomeni Weleguela, Jean-Sébastien Micha, Odile Robach, Thierry Mourier, Patrice Gergaud, Pierre Bleuet. In-situ X-ray μLaue diffraction study of copper through-silicon vias. Microelectronics Reliability, 56:78-84, 2016. [doi]

Authors

Dario Ferreira Sanchez

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Shay Reboh

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Monica Larissa Djomeni Weleguela

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Jean-Sébastien Micha

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Odile Robach

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Thierry Mourier

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Patrice Gergaud

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Pierre Bleuet

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