In-situ X-ray μLaue diffraction study of copper through-silicon vias

Dario Ferreira Sanchez, Shay Reboh, Monica Larissa Djomeni Weleguela, Jean-Sébastien Micha, Odile Robach, Thierry Mourier, Patrice Gergaud, Pierre Bleuet. In-situ X-ray μLaue diffraction study of copper through-silicon vias. Microelectronics Reliability, 56:78-84, 2016. [doi]

@article{SanchezRWMRMGB16,
  title = {In-situ X-ray μLaue diffraction study of copper through-silicon vias},
  author = {Dario Ferreira Sanchez and Shay Reboh and Monica Larissa Djomeni Weleguela and Jean-Sébastien Micha and Odile Robach and Thierry Mourier and Patrice Gergaud and Pierre Bleuet},
  year = {2016},
  doi = {10.1016/j.microrel.2015.10.008},
  url = {http://dx.doi.org/10.1016/j.microrel.2015.10.008},
  researchr = {https://researchr.org/publication/SanchezRWMRMGB16},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {56},
  pages = {78-84},
}