Statistical Characterization of Off-State Stress Degradation in Planar HKMG nFETs Using Device Arrays

Pablo Saraza-Canflanca, Dishant Sangani, Javier Diaz-Fortuny, Stanislav Tyaginov, Georges G. E. Gielen, Erik Bury, Ben Kaczer. Statistical Characterization of Off-State Stress Degradation in Planar HKMG nFETs Using Device Arrays. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 8, IEEE, 2024. [doi]

Abstract

Abstract is missing.