Intermediate BEOL process influence on power and performance for 3DVLSI - researchr publication authors

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Hossam Sarhan, Sebastien Thuries, Olivier Billoint, Fabien Deprat, Alexandre Ayres De Sousa, Perrine Batude, Claire Fenouillet-Béranger, Fabien Clermidy. Intermediate BEOL process influence on power and performance for 3DVLSI. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

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