Intermediate BEOL process influence on power and performance for 3DVLSI

Hossam Sarhan, Sebastien Thuries, Olivier Billoint, Fabien Deprat, Alexandre Ayres De Sousa, Perrine Batude, Claire Fenouillet-Béranger, Fabien Clermidy. Intermediate BEOL process influence on power and performance for 3DVLSI. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

@inproceedings{SarhanTBDSBFC15,
  title = {Intermediate BEOL process influence on power and performance for 3DVLSI},
  author = {Hossam Sarhan and Sebastien Thuries and Olivier Billoint and Fabien Deprat and Alexandre Ayres De Sousa and Perrine Batude and Claire Fenouillet-Béranger and Fabien Clermidy},
  year = {2015},
  doi = {10.1109/3DIC.2015.7334472},
  url = {http://dx.doi.org/10.1109/3DIC.2015.7334472},
  researchr = {https://researchr.org/publication/SarhanTBDSBFC15},
  cites = {0},
  citedby = {0},
  booktitle = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-9385-0},
}