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On-Machine Optical Surface Profile Measuring System for Nano-Machining

Hiroshi Sawano, Motohiro Takahashi, Hayato Yoshioka, Hidenori Shinno, Kimiyuki Mitsui. On-Machine Optical Surface Profile Measuring System for Nano-Machining. IJAT, 5(3):369-376, 2011. [doi]

Authors

Hiroshi Sawano

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Motohiro Takahashi

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Hayato Yoshioka

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Hidenori Shinno

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Kimiyuki Mitsui

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