Hiroshi Sawano, Motohiro Takahashi, Hayato Yoshioka, Hidenori Shinno, Kimiyuki Mitsui. On-Machine Optical Surface Profile Measuring System for Nano-Machining. IJAT, 5(3):369-376, 2011. [doi]
@article{SawanoTYSM11,
title = {On-Machine Optical Surface Profile Measuring System for Nano-Machining},
author = {Hiroshi Sawano and Motohiro Takahashi and Hayato Yoshioka and Hidenori Shinno and Kimiyuki Mitsui},
year = {2011},
doi = {10.20965/ijat.2011.p0369},
url = {http://dx.doi.org/10.20965/ijat.2011.p0369},
researchr = {https://researchr.org/publication/SawanoTYSM11},
cites = {0},
citedby = {0},
journal = {IJAT},
volume = {5},
number = {3},
pages = {369-376},
}