On-Machine Optical Surface Profile Measuring System for Nano-Machining

Hiroshi Sawano, Motohiro Takahashi, Hayato Yoshioka, Hidenori Shinno, Kimiyuki Mitsui. On-Machine Optical Surface Profile Measuring System for Nano-Machining. IJAT, 5(3):369-376, 2011. [doi]

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