Improving wafer map classification in Industry 4.0

Michael Scheiber, Clement Nartey, Anja Zernig, Andre Kästner. Improving wafer map classification in Industry 4.0. In 5th IEEE International Conference on Industrial Cyber-Physical Systems, ICPS 2022, Coventry, United Kingdom, May 24-26, 2022. pages 1-6, IEEE, 2022. [doi]

Abstract

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