Electrical Performance Evaluation of FIB Edited Circuits through Chip Backside Exposing Shallow Trench Isolations - researchr publication

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Rudolf Schlangen, Uwe Kerst, A. Kabakow, Christian Boit. Electrical Performance Evaluation of FIB Edited Circuits through Chip Backside Exposing Shallow Trench Isolations. Microelectronics Reliability, 45(9-11):1544-1549, 2005. [doi]

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