Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node

Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit. Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability, 46(9-11):1498-1503, 2006. [doi]

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