Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node - researchr publication

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Rudolf Schlangen, Peter Sadewater, Uwe Kerst, Christian Boit. Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node. Microelectronics Reliability, 46(9-11):1498-1503, 2006. [doi]

Abstract is missing.

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