Nanoindentation to investigate IC stability using ring oscillator circuits as a CPI sensor

S. Schlipf, André Clausner, J. Paul, S. Capecchi, L. Wambera, K. Meier, Ehrenfried Zschech. Nanoindentation to investigate IC stability using ring oscillator circuits as a CPI sensor. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-6, IEEE, 2020. [doi]

Abstract

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