Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted Lundquist, Uwe Kerst, Christian Boit. Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. Microelectronics Reliability, 54(9-10):1794-1797, 2014. [doi]

This author has not been identified. Look up 'Philipp Scholz' in GoogleThis author has not been identified. Look up 'Norbert Herfurth' in GoogleThis author has not been identified. Look up 'Michael Sadowski' in GoogleThis author has not been identified. Look up 'Ted Lundquist' in GoogleThis author has not been identified. Look up 'Uwe Kerst' in GoogleThis author has not been identified. Look up 'Christian Boit' in Google

runs on WebDSL