Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted Lundquist, Uwe Kerst, Christian Boit. Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. Microelectronics Reliability, 54(9-10):1794-1797, 2014. [doi]
@article{ScholzHSLKB14,
title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm},
author = {Philipp Scholz and Norbert Herfurth and Michael Sadowski and Ted Lundquist and Uwe Kerst and Christian Boit},
year = {2014},
doi = {10.1016/j.microrel.2014.07.062},
url = {http://dx.doi.org/10.1016/j.microrel.2014.07.062},
researchr = {https://researchr.org/publication/ScholzHSLKB14},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {54},
number = {9-10},
pages = {1794-1797},
}