Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm - researchr publication bibliographies

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Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted Lundquist, Uwe Kerst, Christian Boit. Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. Microelectronics Reliability, 54(9-10):1794-1797, 2014. [doi]

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