Performance improvement of self-aligned HfO::2::/TaN and SiON/TaN nMOS transistors - researchr publication authors

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T. Schram, L.-Å. Ragnarsson, G. Lujan, W. Deweerd, J. Chen, W. Tsai, K. Henson, R. J. P. Lander, J. C. Hooker, J. Vertommen. Performance improvement of self-aligned HfO::2::/TaN and SiON/TaN nMOS transistors. Microelectronics Reliability, 45(5-6):779-782, 2005. [doi]

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