WS2 transistors on 300 mm wafers with BEOL compatibility - researchr publication authors

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Tom Schram, Quentin Smets, B. Groven, M. H. Heyne, E. Kunnen, A. Thiam, K. Devriendt, Annelies Delabie, Dennis Lin, M. Lux, Daniele Chiappe, I. Asselberghs, S. Brus, Cedric Huyghebaert, S. Sayan, A. Juncker, Matty Caymax, Iuliana P. Radu. WS2 transistors on 300 mm wafers with BEOL compatibility. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 212-215, IEEE, 2017. [doi]

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