Wolfgang Schreiber-Prillwitz, Reinhart Job. Designing MEMS pressure sensors with integrated circuitry on silicon for miscellaneous applications. In 4th IEEE Latin American Symposium on Circuits and Systems, LASCAS 2013, Cusco, Peru, February 27 - March 1, 2013. pages 1-4, IEEE, 2013. [doi]
Abstract is missing.