PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch

P. Schuddinck, F. M. Bufler, Yang Xiang, A. Farokhnejad, Gioele Mirabelli, A. Vandooren, Bilal Chehab, A. Gupta, C. Roda Neve, Geert Hellings, Julien Ryckaert. PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 365-366, IEEE, 2022. [doi]

Abstract

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