Christian Schwaer, David Stefanek, Andreas Sinn, Georg Schitter. Integrated Force Sensor based on Optical Distance Measurement for a Modular Actuator used in Active Optics. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2022, Sapporo, Japan, July 11-15, 2022. pages 496-501, IEEE, 2022. [doi]
Abstract is missing.